碳纳米管冷阴极超高真空鞍场规的电场模拟与实验研究  

Experimental study and electric field simulation of a UHV saddle field gauge with a CNT field emitter

作　　者：盛雷梅[1] 魏洋[1] 柳鹏[1] 刘亮[1] 齐京[2] 范守善[1] 

机构地区：[1]清华-富士康纳米科技研究中心清华大学物理系,北京100084 [2]清华大学电子工程系,北京100084

出　　处：《真空》2005年第4期29-31,共3页Vacuum

摘　　要：在静电鞍场规的基础上研制了一种碳纳米管(CNT)冷阴极鞍场规(SFG)。这种冷阴极鞍场规具有电极尺寸小,吸放气率低,热效应低,功耗低的特点。本文首先计算了碳纳米管冷阴极鞍场规的电场分布,计算结果表明,二极型碳纳米管电子枪的引出栅极的正电位在低于100 V的情况下对环形阳极鞍场规的轴向电位分布影响很少;并且在现有条件下对规管参数进行了测试,实验测定的规管对空气的灵敏度是1.05 Pa-1,规管功耗由热阴极规的0.9瓦减小到7毫瓦。An ion-gauge was developed on the basis of electrostatic saddle field confinement which is capable of producing long electron path and consequently efficient gas phase ionization. The ion-gauge with carbon-nanotube (CNT) field emitter shows very small electrode sizes and low outgassing/sorption rates. Its performance is as follows:grounded cathode,anode potential 1750 V, grid potential 88 V and gauge sensitivity factor 1.05 Pa^(-1) in air. The power consumption for the gauge is less than 7 mW.

关 键 词：碳纳米管 场发射 鞍场规 电场模拟 

分 类 号：TB771[一般工业技术—真空技术] O48[理学—固体物理]