全数字式容栅位移传感器  

Digital Capacitive Grating System

作　　者：杨雪芳[1] 蔡萍[1] 王卫钢[1] 杨重远[1] 

机构地区：[1]上海交通大学电子信息学院仪器系,上海200030

出　　处：《仪表技术与传感器》2005年第7期5-6,共2页Instrument Technique and Sensor

摘　　要：介绍了基于周期比较测量法的全数字式容栅位移传感器的工作原理和系统构成,分析了该传感器的性能参数和测量精度,设计了容栅传感器的三层极板结构形式和正余弦电极形式,针对容栅传感器的边缘效应给系统带来的非线性误差,提出了结构级的线性化方案,利用单片机和通用器件实现该传感器系统,并给出了实际测量结果,验证了系统方案的可行性。Gave a brief introduction of the principle and the structure of digital capacitive grating system which was based on the periodically-comparative measurement,analysed the sensor measurement precision and parameter of capability,designd three-layer board and sine-cosine electrode structure for capacitive grating sensor,then advanced a structural linearization project according to the system's non-linearity due to marginal utility.A laboratory model using single-chip and universal apparatus shows the preciseness of measurement system.The measurement error was analyzed and the experiment data of the system level implementation presented,which shows the feasibility of digital capacitive grating system.

关 键 词：容栅位移传感器 周期比较测量 三层极板 正余弦极板 线性化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]