反射准直式莫尔偏折法的研究  

On Mire Deflectometry with Reflective Collimation

作　　者：廖兆曙[1] 陶景光[1] 

机构地区：[1]华中理工大学光电子工程系

出　　处：《华中理工大学学报》1995年第A01期19-22,共4页Journal of Huazhong University of Science and Technology

摘　　要：在分析莫尔偏折术测量误差的基础上探讨了一种反射准直式莫尔偏折法，并阐述了其几种应用。该法简单方便，相对定位精度可达０．１％左右。The influence of beam-divergence on the measuring error in Moire deflectometry is ana-lyzed.The direction modulation of the moire fringe due to the mirror defocusing is studied. Based on the feature that the beam will be collimated with high accuracy when using the moire deflectornetry,moire deflectometry with reflective collimation is proposed.It is used in the precision positioning and the acquisition of the dynamic focusing servo signal in the op-tical Fourier transform system. It is simple and convenient and a relative positioning accura-cy of 0.1%can be achieved.

关 键 词：莫尔偏折术 准直 反射 定位 几何光学 

分 类 号：O435.1[机械工程—光学工程]