声表面波压力传感器的研制  

Development of SAW Pressure Sensor

作　　者：张晖[1] 程国辉[1] 李国选[1] 

机构地区：[1]四川压电与声光技术研究所

出　　处：《压电与声光》1989年第6期1-5,54,共6页Piezoelectrics & Acoustooptics

摘　　要：本文简单介绍了声表面波压力传感器的结构设计与原理;给出了试样的初步测试结果以及分析讨论;提出了进一步改进性能的措施。In this paper, the structure, design and the principle of the SAW pressure sensor are discribed. The primary measuring results of the prototype and the roughly analysis for it are presented. Finally, The methods for improving its performance are proposed.

关 键 词：声表面波 压力 传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]