用吸收光谱法测定鎓盐光解生成酸的量子产率  

MEASURING QUANTUM YIELDS OF ACID EORMED IN PHOTOLYSIS OF ONIUM SALTS BY USING ABSORPTION SPECTROMETRY

作　　者：戴光松[1] 吴世康[1] 

机构地区：[1]中国科学院感光化学研究所

出　　处：《感光科学与光化学》1995年第4期358-361,共4页Photographic Science and Photochemistry

摘　　要：用吸收光谱法测定鎓盐光解生成酸的量子产率戴光松．吴世康Ｗ．Ｓｃｈｎａｂｅｌ（中国科学院感光化学研究所，北京１００１０１）（Ｈａｈｎ－Ｍｅｉｔｎｅｒ－ＩｎｓｔｉｔｕｔＧｍｂＨＢｅｒｌｉｎ，Ｇｅｒｍａｎｙ）关键词光解，盐化合物，吸收光谱法，量子产率近年来...Onium salts with non-nucleophilic complex metal halide anions are good phtoto initiators,and have been extensively used in acid-catalyzed semiconductor lithography,Upon UVirradiation of these salts,protonic acid is formed. Measuring quantum yields of acid is veryimportant in order to improve the quality of photoresists. In this work, a new method ofmeasuring quantum yields of acid formed in photolysis of onium salts was described.Theamount of acid produced on irradiation was measured by a non-aqueous photometric methodusing sodium 4-nitrophenoxide as an indicator in acetonitrile standardized with trifluo-romethanesulphonic acid.The results determined have best repetition and higher sensitivitycompared with aqueous base-acid titration. The experimental results have been also discussed.

关 键 词：光解 Weng盐化合物 吸收光谱法 量子产率 酸 

分 类 号：O644.1[理学—物理化学]