激光扫描测厚的信号处理  

Signal Processing of Laser Scanning for Thickness Measurement

作　　者：于从新[1] 项世法[1] 

机构地区：[1]大连理工大学物理系

出　　处：《光电工程》1995年第5期69-72,共4页Opto-Electronic Engineering

基　　金：辽宁省科委基金

摘　　要：简要介绍了激光扫描测厚的基本原理；分析了被测表面上光点线度和接收器光栏狭缝宽度对测量精度的影响；介绍了一种提高测量精度的双频脉冲计数信号处理方法。This paper briefly introduces the basic principles of laser scanning for thickness measurement,analyses the effects of the light spot size and the width of a aperture slit of the receiver on the surface to be measured and the measuring accuracy, and descfibed a new method for signal processing of double frequency pulse counting with higher measuring accuracy.

关 键 词：厚度测量 激光测量 激光扫描 信号处理 测量精度 

分 类 号：TN247[电子电信—物理电子学]