实时偏振相移干涉技术及其应用  

Shearing Interferometry with Real-Time Polarization Phase-Shifting Technique

作　　者：戴嘉彬[1] 秦玉文[1] 

机构地区：[1]天津大学力学系,河北工程技术高等专科学校经贸系

出　　处：《光学学报》1995年第8期1127-1130,共4页Acta Optica Sinica

摘　　要：提出一种实时偏振相移干涉技术，该方法具有光路简单，不需防震、可明室操作、易于实现相移、便于计算机自动分析条纹，从而实现实时高精度自动化测量等优点。文中对该方法给出了严格的理论推导和实验验证。ased on the principle of projected grating, a new real-time polarization phaseshift shearing interferometry is proposed and discussed. The method can be used for measuring shapes of 3-D diffuse objects and displacement of large deformation automatically. Some experiments were demonstrated to verify the validaty of the present technique.

关 键 词：偏振相移 剪切 干涉计量术 

分 类 号：TG83[金属学及工艺—公差测量技术]