高温超导红外探测器的电极工艺探讨  

On the Electrode Technology of High T_c Superconducting Detector

作　　者：黄江平[1] 李国桢[1] 曾群德[1] 卢俊杰[1] 李丹[1] 黄宗坦[1] 董先庆[1] 

机构地区：[1]昆明物理研究所

出　　处：《红外技术》1995年第6期4-7,共4页Infrared Technology

摘　　要：介绍了高温超导红外探测器电极材料的选择和制备。选用先蒸银、后蒸金，再合金化的电极工艺。芯片装配成器件后，器件性能稳定，膜层牢固，接触电阻小。The material selection and manufacturing process for the preparation of electrodes in high Tc Superconductive IR detectors are reported, including the evaporation of silver, gold and then alloying. The devices thus made have a good and stable performance.

关 键 词：高温超导 红外探测器 电极 

分 类 号：TN215[电子电信—物理电子学]