长波长1．3μm激光器腔面镀减反射膜超辐射发光管的制备  

FABRICATION OF LONG WAVELENGTH 1.3μm SUPERLUMINESCENT DIODES WITH ANTIREFLECTIVE COATINGS ON LASER DIODE FACETS

作　　者：鲍海飞[1] 石家纬[1] 刘明大[1] 

机构地区：[1]吉林大学光电子实验室

出　　处：《红外与激光技术》1995年第4期56-59,共4页

摘　　要：本实验采用ＩＬ－４００型膜厚速率控制仪和钼舟，对半导体激光器端面分别蒸镀单层和双层减反射膜来制备长波长超辐射发光二极管，并对蒸镀减反射膜后器件的功率特性和光谱特性方面进行了测试。In this work using IL-400 controller and molybdenum boat,prep-aration of long wavelength superlumineseent diode coated by single and double antireflective coating on the semiconductor laser facets have been fabricated, and the spectral characteristics and power are tested after evaporation.

关 键 词：超辐射 发光二极管 钼舟 半导体激光器 

分 类 号：TN248.4[电子电信—物理电子学]