超光滑表面轮廓的绝对测量  

Absolute Measurement of Supersmooth Surface Profile

作　　者：高宏[1] 薜实福 李庆详 严普强[1] 

机构地区：[1]清华大学精仪系

出　　处：《计量学报》1995年第2期104-108,共5页Acta Metrologica Sinica

摘　　要：本文提出了一种测量超光滑表面轮廓的绝对测量方法。采用微分干涉显微镜直接测量表面轮廓的差分，从而无需使用标准参考反射镜，并能有效地抑制机械振动等环境干扰对测量结果的影响。在不采取隔振和恒温等环境控制措施的一般实验室场合下，就可达到优于０．１ｎｍ的垂直分辨率和０．１５ｎｍ的表面轮廓重复测量精度。A technique for absolute measurement of supersmooth surface profile is described. The technique, by using of a differential interference microscope, is insensitive to vibration and no reference surface is needed. It has measured surface profiles with a vertical resolution of less than 0.1nm and a repeatability of 0 .15nm in an ordinary laboratory environment without vibration isolation.

关 键 词：表面轮廓 表面粗糙度 轮廓 测量 绝对测量 

分 类 号：TG84[金属学及工艺—公差测量技术]