微型薄膜气敏元件的热功耗分析  

Analysis for Thermal-Power Consumption of Mini-type Thin-film Gas Sensors

作　　者：吕红浪[1] 兰怀迎 李东华 刘文利[3] 

机构地区：[1]济南大学机械工程学院,济南250022 [2]济南半导体研究所,济南250078 [3]山东大学物理与微电子学院,济南250061

出　　处：《上海交通大学学报》2005年第7期1201-1204,共4页Journal of Shanghai Jiaotong University

基　　金：山东省火炬计划项目:平面薄膜微型传感器

摘　　要：为了提出微型薄膜气敏元件热功耗的计算公式,通过实验,研究了元件引线的散热量、金属网罩和元件底座的平均温度、芯片的传热系数随芯片散热面尺寸和工作温度的变化规律.利用所给出的热功耗公式,对微型薄膜气敏元件的热功耗进行了计算,结果与实验一致.In order to propose a formula to calculate the thermal-power consumption of mini-type thin-film gas sensors, this paper studied experimentally the dissipating heat of lead-wires, the average temperatures of wire-mesh and founation, the regularity of sensor＇s heat transfer coefficients varying with the size of the heat transfer surface and working themperature. By means of the formula yielded in this paper, the thermal-power consumption of some mini-type thin-film gas sensors was calculated and the results consisted with the experiment

关 键 词：薄膜 气敏元件 热功耗 传热系数 

分 类 号：TN305.94[电子电信—物理电子学]