三分量光弹波导混合集成加速度传感器  

Three-component Hybrid-integrated Optical Acceleration Seismic Geophone Based on Photoelastic Waveguide

作　　者：唐东林[1] 陈才和[1] 崔宇明[1] 王金海[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院光电信息技术科学教育部重点实验室,天津300072

出　　处：《光子学报》2005年第7期1062-1065,共4页Acta Photonica Sinica

摘　　要：三分量光弹波导MZ干涉型集成加速度传感器的研究,为高频高精度地震勘探提供集成化的高精度传感器.利用光弹原理,分析了光弹效应检测任意方向加速度的原理.在X切Y传LiNbO3晶体上,设计制作了光波导双MZ干涉仪及各集成器件:波导相位调制器、波导偏振器.三分量光弹波导MZ干涉型集成加速度传感器测试表明:该传感器动态范围宽、线性性好.主要参数为:相位灵敏度达1.81×10-4Rad/m·s-2;工作频带3～1506(Hz).In order to provide a high resolution wide band geophone for three-dimensional seismic geophone, the three-component hybrid-integrated optical acceleration seismic geophone is designed. Analysing the photoelastic effect of LiNbO3 waveguide applied arbitrary-direction acceleration. The MachZehnder interferometer is realized by symmetrical Y-branching waveguide,waveguide phase modulator and two waveguide polarizers, which are monolithically integrated on an X-cut, Y-propagating LiNbO3 substrate. The results reveal that the accelerometer has wide band and good linearity. The main design parameters of the geophone system is as following, natural frequency.4300 Hz;phase detection sensitivity △φ/a. 1.81× 10^-4 rad/m·s^-2;work frequency range： 3～1506 Hz.

关 键 词：混合集成 三分量加速度传感器 光弹波导 马赫-曾德干涉 光学效应 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]