基于加弧辉光复合渗镀技术的Al_2O_3陶瓷表面合金化  

Research of Surface Metallization of Al_2O_3 Ceramic Based on Composite Deposited Technology by Arc-added Glow Discharge

作　　者：王文先[1] 张红霞[1] 侯文义[1] 崔泽琴[1] 

机构地区：[1]太原理工大学材料科学与工程学院,山西太原030024

出　　处：《材料热处理学报》2005年第3期54-57,共4页Transactions of Materials and Heat Treatment

基　　金：山西省自然科学基金资助项目 (2 0 0 4 1 0 52 )

摘　　要：基于加弧辉光复合渗镀技术,采用自行研制的复合靶对Al2 O3陶瓷表面进行Cu、Ti复合渗镀,实现了Al2 O3陶瓷表面合金化。采用光学显微镜、SEM、EDS、XRD、声发射划痕等测试手段对渗镀层进行分析。研究了复合渗镀机理、渗镀层成分和元素分布、渗镀层相结构以及渗镀层与基体的接合机理。在1 0 0N的最大载荷下,渗镀层与陶瓷基体未发生剥离和崩落现象。这种方法为各种陶瓷材料表面合金化及其与金属材料的微连接提供了新途径。Based on the composite depositing technology by the arc-added glow discharge, the composite target was used to deposit Cu and Ti alloy on the Al2O3 ceramics surface, realizing the surface alloying of Al2O3 ceramics. The deposited layer was characterized by SEM, EDS, XRD and the acoustic emission scratching method. The composition distribution, the phase analysis of the depositing layer and joint mechanism of the depositing layer to ceramic substrate are studied. No spallation of the deposited layer from the ceramic substrate is observed under loading of 100 N. The method provides a new approach for surface alloying of ceramic materials and joining of ceramics to metal materials.

关 键 词：AL2O3陶瓷 复合渗镀 表面合金化 加弧辉光 

分 类 号：TQ174.444[化学工程—陶瓷工业] TG113[化学工程—硅酸盐工业]