精研磨阶段非球面面形接触式测量误差补偿技术  

TOUCH TRIGGER PROBE MEASUREMENT ACCURACY OF ASPHERICAL MIRROR DURING FINE LAPPING PROCESS

作　　者：程灏波[1] 

机构地区：[1]北京理工大学光电工程系,北京100081

出　　处：《机械工程学报》2005年第8期228-232,共5页Journal of Mechanical Engineering

基　　金：国家自然科学基金资助项目(50175062)。

摘　　要：在对高精度非球面光学元件进行磁流变抛光制造过程中,为了提高达到最终要求的15-30 nm(方均根值) 光学级面形精度的加工效率,必须经过非球面面形快速修正的精研磨过程。针对精研磨阶段的面形误差数字化技术进行了深入分析,建立了分离影响误差收敛精度的线性误差矩阵,并借助于一块具有中心遮拦孔的同轴抛物面反射镜进行验证,结果表明所建立的倾斜误差分离矩阵对于指导非球面研磨阶段的面形检测具有明确的效果,能够提供该阶段待检测工件面形的准确信息,保证了研磨阶段检测与加工的密切衔接,缩短了进入光学抛光阶段的周期。The surface error ofaspheric mirror during grinding ranges from tens of microns to a few microns, proper measurement method will decide the convergent speed and precision ofthe error in this range. The form error digitization technique is thoroughly analyzed in view of the grinding process, and the linearity error matrix that affects error contraction accuracy is also established. Moreover the matrix is testified utilizing a co-axis parabolic mirror after magnetorheological finishing with figure accuracy of 60 nm （Root Mean Square, RMS）, the testing result shows the matrix has good effect to remove linearity error and provide exact data information, guarantees the testing results closely link with the manufacturing process and decreases the cycles entering into optical polishing process.

关 键 词：磁流变 抛光 非球面 精研磨 轮廓测量 

分 类 号：TG76[金属学及工艺—刀具与模具]