气相下材料真空放气性能的理论研究  

Study on the Outgassing Character of Material under Gas Atmosphere

作　　者：肖尤明[1] 金听祥[1] 徐烈[1] 

机构地区：[1]上海交通大学制冷与低温研究所

出　　处：《低温与超导》2005年第3期25-28,共4页Cryogenics and Superconductivity

基　　金：国家863基金(2002AA306412)资助的课题

摘　　要：气相下,材料表面气体分子的脱附速率会大大增加。文中对这方面的研究进行了总结,并应用分子动力学理论,从气相空间分子间的碰撞、气相空间分子与材料表面的碰撞、气相空间分子与材料表面的相互作用、材料表面气体分子的徙动、材料表面气体分子的脱附几个方面,从理论上研究气相下材料的真空放气性能。Under gas atmosphere, the desorption rate will increase sharply. In this paper, the molecule kinetics theory was adopted to explain the desorption mechanism under gas atmosphere. Through the investigations of gas molecules impact in gaseous phase space, gas molecules in gaseous phase space collision with the surface of material, the interaction between the gas molecules in gaseous phase space and the surface of material, the gas migration on the surface and the gas desorption from the surface, it is found that when certain high--purity gas has been charged into the vacuum space, the desorption rate of the gas has improved sharply.

关 键 词：材料表面 气体分子 脱附速率 真空放气性能 

分 类 号：O552.33[理学—热学与物质分子运动论]