利用振幅型空间光调制器作相移器的相移干涉术  

Phase-shifting interferometry with an amplitude-only liquid-crystal spatial light modulator as phase shifter

作　　者：刘青[1] 蔡履中[1] 王玉荣[1] 赫明钊[1] 

机构地区：[1]山东大学信息科学与工程学院,山东济南250100

出　　处：《山东大学学报（理学版）》2005年第4期77-80,共4页Journal of Shandong University(Natural Science)

基　　金：国家自然科学基金资助项目(60177002)

摘　　要：利用电寻址的振幅型空间光调制器作相移器,可以通过计算机单向移动写入空间光调制器上的二值光栅,从而实现精确的相移.该空间调制器分辨率高,系统中无机械马达及传动器件,毋需相移器的标定,易于实现,理论分析和实验结果分别验证了其可行性和正确性.A method of phase-shifting interferometry with a binary grating displayed on a high-resolution electrically addressed amplitude-only liquid-erystal spatial light modulator as a phase shifter was proposed. It ean aehieve aeeurate phase shifts just by moving this grating digitally. This system can be easily realized without the need of any step-motor or moving part and the procedure of ealibration. Both the theoretieal analysis and the experiment verifieation are given.

关 键 词：光栅 相移 图像再现 干涉计量 

分 类 号：O438[机械工程—光学工程] TN26[理学—光学]