空心阴极放电离子镀法沉积氮化钛涂层  

TiN coating deposited by hollow cathode discharge ion plating

作　　者：解正国[1] 石铭德[1] 庄谨 

机构地区：[1]清华大学核能技术设计研究院

出　　处：《清华大学学报（自然科学版）》1995年第2期103-108,共6页Journal of Tsinghua University(Science and Technology)

摘　　要：论述了空心阴极放电离子镀的工作原理，ＫＹＦ－６００型离子镀膜机的特点，各工艺参数的选择与控制以及ＴｉＮ涂层齿轮切削性能的试验与结果分析。试验表明，经镀覆ＴｉＮ的高速钢齿轮刀具可提高寿命１至４倍，经济效益显著。The principle of HCD ion plating is described. The characteristics of the ion plating equipment of the model KYF-600,the selection and control of the process parameters,and the test resullts of cutting properties for gear tools coated with TiN are discussed.The experimental results denote that the service life of HSS (high speed steel)gear tools coated with TiN has increased by 2￣5 times, and the economic benefit is also remarkable.

关 键 词：空心阴极 放电离子镀 氮化钛 涂层 

分 类 号：TG174.44[金属学及工艺—金属表面处理]