油增压泵油箱清理方法探讨  

THE APPROACHING OF THE CLEANING WAY ABOUT OIL-BOX IN OIL-PRESSURED PUMP

作　　者：徐树松[1] 路雅萱[1] 林洋[1] 

机构地区：[1]深圳大学反光材料研究所

出　　处：《特区科技》1995年第2期8-9,共2页Shenzhen Science Magazine

摘　　要：本文叙述了真空镀膜设备中油增压泵油箱体内碳氢化合物的化学清洗方法及其反应机理。It is described in this article about the chemical cleaning way and its reaction mechanism of hydrocarbon in the oil-box,which is set up in oil-pressured pump of vapor-coat equipmment.

关 键 词：油增压泵 箱体 油箱 真空泵 清理方法 

分 类 号：TB752.41[一般工业技术—真空技术]