SZ－1型四极质谱计质谱管的清洗与调试  

Cleaning and Test for a Probe of Quadrupole Mass Spectrometer SZ-1

作　　者：刘志满[1] 李琦[1] 

机构地区：[1]中国科学院高能物理研究所

出　　处：《真空》1995年第5期31-34,共4页Vacuum

摘　　要：本文以ＢＥＰＣ储存环上使用的四极质谱计为例，说明工作一段时间后清洗质谱管的必要性。文中讨论了清洗方法的细节，并用残余气体分析质谱图说明了清洗的效果。它对四极质谱计的用户如何保养仪器有重要的参考价值。AbstractAfter a period of operation the probe cleaning of quadrupole mass spectrometer (QMS) isnecessary, as an example with QMS use in BEPC showed this fact. Detail method of cleaning for aprobe is discussed. and residual gases analysis mass spectrograph show the effect of cleaning inthis paper.This is of worthy of a paper for user of QMS, it was shown how maintain instrument.

关 键 词：真空质谱计 清洗 保养 

分 类 号：TB773[一般工业技术—真空技术]