阳极预电离改善准分于激光器放电均匀性  

Preionization near Anode Improves Homgenity of Discharge in an Excimer Laser

作　　者：熊旭明[1] 秦玉英 王广昌 张兆平 马树森[1] 

机构地区：[1]中国科学院安徽光机所七室

出　　处：《中国激光》1995年第3期199-201,共3页Chinese Journal of Lasers

摘　　要：提出了准分子激光器阳极预电离方案，并在实验上证实了阳极预能有效地改善放电均匀性，同时使激光输出能量略有提高。The preionization near anode was suggestted in stead of preionization near cathode and experiments show that preionization near anode has improved both discharge homogenity and pulse energy output.

关 键 词：准分子激光器 预电离 放电 均匀性 

分 类 号：TN248.2[电子电信—物理电子学]