铌酸钡钠光波导薄膜的脉冲激光淀积制备和研究  

Investigation on Barium Sodium Niobate Optical-Waveguide Films by Pulsed Laser Deposition Technique

作　　者：张苹 张锋 刘俊明[1] 刘治国[1] 

机构地区：[1]南京大学固体微结构物理国家重点实验室

出　　处：《中国激光》1995年第6期461-464,共4页Chinese Journal of Lasers

摘　　要：报道了用脉冲激光淀积（ＰＬＤ）方法在磷酸氧钛钾（ＫＴＰ）晶体（１００）面上生长沿［１１０］取向的铌酸钡钠（ＢＮＮ）光波导薄膜。Ｘ射线衍射，扫描电子显微镜，Ｘ射线光电子能借测量表明生长的ＢＮＮ膜是外延单晶膜。膜表面粗糙度很小。光波导模式和光损耗测量表明膜具有较低的损耗。This paper reports that the barium sodium niobate (BNN) optical-waveguide film with orientation [110] has been epitaxially grown on the (100) plane of substrate KTiOPO4(KTP) by pulsed laser deposition (PLD). The measurements of XRD, SEM and XPS show that the as- grown BNN film is epitaxial single crystal with smooth surface. The measurements of optical-waveguide mode and propagation loss indicate that the film is of good optical waveguide properties with low loss.

关 键 词：光波导 脉冲激光淀积 铌酸钡钠 薄膜 

分 类 号：TN814.6[电子电信—信息与通信工程] TB43[一般工业技术]