陶瓷薄膜制备技术研究进展  

Research progress in fabrication of ceramic coatings

作　　者：田永生[1] 陈传忠[1] 王德云[1] 陈丽霞 雷廷权[3] 

机构地区：[1]山东大学材料科学与工程学院,山东济南250061 [2]山东电子器材厂,山东济南250103 [3]哈尔滨工业大学材料科学与工程学院,黑龙江哈尔滨150001

出　　处：《材料科学与工艺》2005年第4期427-430,434,共5页Materials Science and Technology

基　　金：山东省优秀中青年科学家科研奖励基金资助项目(02BS056).

摘　　要：陶瓷薄膜具有耐磨、耐蚀、耐高温和抗微生物侵蚀等性能,在航天、化工机械、生物医学等行业获得了广泛的应用,从而推动着陶瓷薄膜的材质和制备工艺不断发展.综述了微弧氧化、溶胶凝胶和电泳沉积等制备陶瓷薄膜常用工艺的研究进展,分析了工艺参数对陶瓷膜组织结构和性能的影响.目前,制备工艺正向着电子束、离子束和激光束之间的组合和其工艺间复合的方向发展,陶瓷薄膜正向着多元膜、多层膜、梯度膜和纳米复合膜方向发展.Ceramic coatings have been widely used in aerospace, mechanical and chemical engineering industries because of their excellent physical, chemical and mechanical properties. Accordingly, the constituents of ceramic coatings and their fabrication technologies are improved continuously. In this paper, current fabricating methods of ceramic coatings are introduced and the effect of fabrication process parameters on the general properties of the ceramic coatings is discussed. The current development trends of fabrication technologies toward the combination among the laser beam, electron beam, ion beam deposition and the other fabricating methods, and the trends of developing high quality coatings toward the multicomponent coatings, gradient composite coatings and the nanocomposite coatings are elucidated.

关 键 词：陶瓷薄膜 制备工艺 研究进展 纳米复合膜 梯度膜 多层膜 多元膜 

分 类 号：O484.1[理学—固体物理]