超磁致伸缩压电直线式蠕动机构的设计  

Linear inchworm mechanism based on giant magnetostrictive and piezoelectric materials

作　　者：李翠红[1] 叶子申[1] 孟永钢[1] 田煜[1] 温诗铸[1] 

机构地区：[1]清华大学精密仪器与机械学系,摩擦学国家重点实验室北京100084

出　　处：《清华大学学报（自然科学版）》2005年第8期1055-1057,1061,共4页Journal of Tsinghua University(Science and Technology)

基　　金：国家"八六三"高技术项目(2002AA23240)

摘　　要：为研制大行程高精度进给机构,基于蠕动运动原理,以超磁致伸缩微驱动器为驱动元件、嵌入柔性铰链中的压电陶瓷驱动器与V形导轨配合为箝位方式,研制了超磁致伸缩压电直线式蠕动机构样机,并利用计算机对其运动进行了闭环反馈控制。运行测试结果表明,该机构能够稳定地蠕动步进和后退,位移重复定位精度可以达到±15nm。A linear inchworm mechanism was developed with a magnetostrictive actuator and two piezoelectric translators fixed in a specially designed flexible frame to provide both long travel range and high positioning precision. The mechanism movement is controlled by a closed-loop feed back algorithm using a high precision length gauge as the transducer. Test results indicate that the mechanism reliably moves forward and backward with a positioning accuracy of up to ±15 nm.

关 键 词：蠕动机构 磁致伸缩 压电 

分 类 号：TH112[机械工程—机械设计及理论]