基于聚合物碳黑混合物气敏微传感器的研究  

Gas Microsensors Based on Polymer-Carbon Black Composites

作　　者：杨秋冬[1] 谢海芬[2] 孙晓翔[1] 黄宜平[1] 

机构地区：[1]复旦大学微电子研究院,上海200433 [2]华东理工大学物理系,上海201512

出　　处：《传感技术学报》2005年第3期504-506,513,共4页Chinese Journal of Sensors and Actuators

摘　　要：通过四种不同的聚合物敏感材料以及混合的碳黑修饰在梳状微电极上,可以得到这种新型的化学气敏电阻型微传感器,将这四种不同聚合物的微传感器分别对丙酮、乙醇、甲醇、甲苯四种有机类气体进行了测试,比较其电阻的相对变化率,利用其响应的主元分析可以将四种气体区分开,并且在一定范围内,电阻的相对变化率可呈一定的线性分布。A novel chemical gas sensor based on polymer-carbon black composite was developed. The four different polymer-carbon black composite are employed as the sensing materials which are immobilized on the interdigitated microelectrode pair. The resistance changes of sensors to four organic gases （acetone, ethanol, toluene and methanol） have been examined. By principle component analysis of responses of micro-sensors, four kinds of the same concentration different gases can be easily discriminated. Furthermore the relationship between the resistance changes and gas concentration in a certain range can be approximated to a straight line.

关 键 词：微传感器 聚合物碳黑混合物 气敏传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]