激光烧蚀金属Al产生电子和离子发射的研究  

Electron and Positive-Ion Emission Produced by Pulsed Nd:YAG Laser Ablation of Metal Al

作　　者：顾英俊[1] 付正文[1] 方尔梯[1] 黄正宇[1] 张谊华[1] 滕玉美[1] 曾宪康[1] 

机构地区：[1]华东理工大学

出　　处：《应用激光》1996年第2期55-57,共3页Applied Laser

基　　金：国家自然科学基金

摘　　要：通过测定脉冲Ｎｄ：ＹＡＧ激光烧蚀金属Ａｌ过程中，在烧蚀靶和收集板上电荷时间分辨的测量，研究了激光烧蚀金属Ａｌ产生的电子和离子发射过程，以及烧蚀环境气压对电子和离子发射过程的影响。结果表明，在激光烧蚀过程中，靶上生成电子和离子，而电子较离子先从靶面出射，随着烧蚀环境气压的增高，饶蚀靶和收集板上的电荷量都迅速减少。By time-resolved measurement of charge in ablation target and collector the emission characters of electron and ion produced by pulsed Nd:YAG laser ablation of metal Al and its change with ablation gas pressure are investigated. The results show that when the metal is ablated by laser electron and ion are formed in ablation target and electron is emitted first. With a rise in pressure, the charge in ablation target and collector produced by laser ablation is decreased rapidly.

关 键 词：激光烧蚀 离子发射 钕:YAG激光 铝 电子发射 

分 类 号：TN241[电子电信—物理电子学]