大型真空装置漏放率的动态质谱测量法  

QMS methods for dynamic measurement of leak and outgassing rate of large vacuum chamber

作　　者：王志文[1] 谢世标[1] 韦卫星[1] 

机构地区：[1]广西民族学院,南宁530006

出　　处：《核聚变与等离子体物理》2005年第3期233-236,共4页Nuclear Fusion and Plasma Physics

摘　　要：根据质谱分析技术和气体动力学方程,提出了一种用质谱测量法对大型真空装置漏放率的测试方法。结合计算机技术能对装置运行状态的漏放率进行巡回检测,并成功地应用于HL-1M装置。According to the gas dynamics and the technique of quadruple mass spectrometry （QMS）, a method for measuring large device vacuum leak rate is put forward. The vacuum leak and outgassing rate can be inspected iteratively with combining computer technique, and this method has applied successfully on the HL-1M tokamak.

关 键 词：质谱分析 漏放率 检测 

分 类 号：TN107[电子电信—物理电子学]