An Electroabsorption Modulator Monolithically Integrated with a Semiconductor Optical Amplifier and a Dual-Waveguide Spot-Size Converter  

电吸收调制器与半导体光放大器和双波导模斑转换器的单片集成(英文)

作　　者：侯廉平[1] 王圩[1] 朱洪亮[1] 周帆[1] 王鲁峰[1] 边静[1] 

机构地区：[1]中国科学院半导体研究所光电子研究发展中心,北京100083

出　　处：《Journal of Semiconductors》2005年第8期1504-1508,共5页半导体学报（英文版）

基　　金：国家自然科学基金重大研究计划(批准号:90101023);国家重点基础研究发展计划(批准号:20000683-1)资助项目~~

摘　　要：A semiconductor optical amplifier and electroabsorption modulator monolithically integrated with a spotsize converter input and output is fabricated by means of selective area growth,quantum well intermixing,and asymmetric twin waveguide technology. A 1550-1600nm lossless operation with a high DC extinction ratio of 25dB and more than 10GHz 3dB bandwidth are successfully achieved. The output beam divergence angles of the device in the horizontal and vertical directions are as small as 7.3°× 18.0°, respectively, resulting in a 3.0dB coupling loss with a cleaved single-mode optical fiber.采用选择区域生长、量子阱混杂和非对称双波导技术制作了电吸收调制器与半导体光放大器和双波导模斑转换器的单片集成器件．器件在波长1．55～1．60μm范围内，3dB带宽大于10GHz，直流消光比为25dB，插入损耗小于0dB，远场发散角为7．3°×18．0°，与单模光纤的耦合效率达3.0dB.

关 键 词：semiconductor optical amplifier electroabsorption modulator spot-size converters selective area growth quantum well intermixing asymmetric twin waveguide 

分 类 号：TN76[电子电信—电路与系统]