微晶硅太阳电池  

Study of Microcrystalline Silicon Solar Cells

作　　者：张晓丹[1] 高艳涛[1] 赵颖[1] 朱锋[1] 魏长春[1] 孙建[1] 耿新华[1] 熊绍珍[1] 

机构地区：[1]南开大学光电子薄膜器件与技术研究所,天津市光电子薄膜器件与技术重点实验室,光电信息技术科学教育部重点实验室(南开大学,天津大学),天津300071

出　　处：《Journal of Semiconductors》2005年第8期1582-1585,共4页半导体学报（英文版）

基　　金：国家重点基础研究发展规划(批准号:G2000028202;G2000028203);国际科技合作资助项目(批准号:2002DFG00051)~~

摘　　要：采用VHF-PECVD技术制备了系列微晶硅太阳电池.综合测试结果表明:硅烷浓度、热阱温度和前电极都对微晶硅太阳电池的性能有影响.在湿法腐蚀的ZnO衬底上制备的电池的效率比在ZnO/SnO2复合膜上制备的电池的效率高1.5%.在优化了沉积条件后,制备出效率达6.7%的微晶硅太阳电池(Jsc=18.8mA/cm2,Voc=0.526V,FF=0.68),电池的结构是glass/ZnO/p(μc-Si∶H)/i(μc-Si∶H)/(a-Si∶H)/Al,没有ZnO背反射电极.A series of microcrystalline silicon thin film and solar cells are fabricated by VHF-PECVD. The results show that characteristics of microcrystalline silicon solar cells intensively depend on silane concentration, thermal-well temperature,and the type of front electrode. In this experiment,microcrystalline silicon solar cells fabricated on an etching ZnO front electrode have higher efficiency than those on a ZnO/SnO2 front electrode. Through optimization of technological conditions,a microcrystalline silicon solar cell with a conversion efficiency of 6.7% is fabricated by VHF PECVD（Jsc = 18.8mA/cm^2 ,Voc =0. 526V, FF= 0.68）. The structure of the solar cells is glass/ZnO/p（μc Si ： H）/i（μc-Si ： H）/（a-Si ： H）/Al. There is no ZnO back reflect electrode.

关 键 词：甚高频等离子体增强化学气相沉积 微晶硅太阳电池 X射线衍射 

分 类 号：TM914[电气工程—电力电子与电力传动]