考虑微磁芯磁阻的分布参数微梁执行器小信号宏模型  

A Mechanical-Magnetic Coupling Macromodel for a Magnetic Microbeam Actuator

作　　者：方玉明[1] 黄庆安[1] 李伟华[1] 

机构地区：[1]东南大学MEMS教育部重点实验室

出　　处：《Journal of Semiconductors》2005年第8期1599-1604,共6页半导体学报（英文版）

基　　金：国家高技术研究发展计划(批准号:2002AA431010);江苏省高校自然科学研究计划(批准号:03KJB510089)资助项目~~

摘　　要：以多级弯曲磁微梁执行器为研究对象,先采用梁的模态函数线性组合来逼近梁的变形曲线,然后利用磁路定律,考虑了在宏观磁执行器中忽略的磁芯磁阻,建立了考虑力-磁耦合的非线性方程组,克服了以往的磁微执行器模型不能考虑力-磁耦合,而且忽略磁芯磁阻的缺点.计算结果与实验数据及有限元计算结果对比表明,文中的模型有足够的精度,可以作为宏模型使用.A mechanical magnetic coupling macromodel for a magnetic microactuator with a multilevel meander is presented. The deformation curve of a microbeam is approximated by linear combination of modal functions for the cantilever-beam. The integration for the magnetic force is calculated by dividing the microbeam into several intervals,and the nonlinear equation set has been developed based on the magnetic circuit principle. The complexity of the macromodel depends on the selection of modal number. In comparison with previous conventional models, this macromodel accounts for the coupling between the beam deflection and magnetic force. The macromodel is validated by comparing its result with experimental results available in some literatures.

关 键 词：多级曲折磁芯微梁执行器 力-磁耦合 宏模型 悬壁梁 

分 类 号：TP215[自动化与计算机技术—检测技术与自动化装置]