3D Surface Morphology Measurement and Auto-focusing System  

作　　者：CHEN Qi ZANG Huai-pei 

机构地区：[1]College of Inform. , Yanshan University, Qinhuangdao 066004, CHN

出　　处：《Semiconductor Photonics and Technology》2005年第3期208-211,共4页半导体光子学与技术（英文版）

摘　　要：When interference microscope measures the surface rough of the micromechanical device, as soon as the work distance of interference microscope and the depth of field is shortened, the interference images become slur for the measured object if there has small interference after clear focus. The auto-focusing system is introduced into the interference microscope, the system can obtain high definition interference image rapidly,and can improve the measuring velocity and measuring precision. The system is characterized by auto-focusing range of ±150 μm, auto-focusing precision of ±0.3 μm, auto-focusing time of 4～8 s.When interference microscope measures the surface rough of the micromechanical device, as soon as the work distance of interference microscope and the depth of field is shortened, the interference images become slur for the measured object if there has small interference after clear focus. The auto-focusing system is introduced into the interference microscope, the system can obtain high definition interference image rapidly, and can improve the measuring velocity and measuring precision. The system is characterized by auto-focusing range of ＋150μm, auto-focusing precision of ±0.3μm, auto-focusing time of 4～8s.

关 键 词：3D surface morphology Interference microscope AUTO-FOCUSING 

分 类 号：U472.44[机械工程—车辆工程] TH741.3[交通运输工程—载运工具运用工程]