微纳定位/进给技术研究现状综述  

Survey of present situation of research on micro-nano positioning and feeding technology

作　　者：嵇国金[1] 马奎[2] 王磊[2] 

机构地区：[1]同济大学电子与信息工程学院,上海200092 [2]同济大学中德学院,上海200092

出　　处：《机械设计》2005年第9期1-3,共3页Journal of Machine Design

摘　　要：微纳定位/进给技术是微纳科学技术、微电子工程、航空航天等领域的关键基础技术。它同时也是微纳科学技术走向产业化的前提。就当前的几种典型的微纳电位/进给技术做一个总结,分析了各种定位/进给机构的定位/进给原理和具体结构,指出了存在的问题和可能的解决方法。Micro-nano positioning and feeding technology is the basic key technique in domains of technology of micro-nano science, microelectronics engineering and aeronautics and astronautics. At the same time it is the prerequisite for the micronano scientific technology move towards industrialization. A summary was made in this paper on the current kinds of typical micro-nano positioning and feeding technology. The positioning and feeding principle and specific structures for various kinds of positioning and feeding mechanism were analyzed, and the existing problems and the possible solving methods have been pointed out.

关 键 词：微纳技术 微纳定位/进给 微纳位移发生/驱动器 

分 类 号：TP271.4[自动化与计算机技术—检测技术与自动化装置]