显微物镜干涉图的计算机处理  

MICROSCOPIC OBJECTIVE INTERFEROGRAM PROCESSING WITH COMPUTER

作　　者：张平[1] 吴震[1] 陈德[1] 向际鹰[1] 

机构地区：[1]华中理工大学光电子工程系

出　　处：《应用光学》1996年第1期30-33,共4页Journal of Applied Optics

摘　　要：提出用泰曼干涉仪检测衍射受限的显微物镜，将实验中拍摄到的干涉图形数字化后，经计算机处理，用Ｚｅｎｉｋｅ多项式拟合干涉图，可获得各采样点波像差、峰谷误差及均方根误差和各种几何像差．Twyman-Green interferometer is used for the testing of diffraction-limited microscopicobjective. After the interferograms pickuped in the experiment are digialized, they are processed bya computer and fit with Zernike polynomial the wave aberration, peak-valley err6r, root-mean-squareerror and various geometric aberrations can be obtained for various sampling points.

关 键 词：干涉图 显微物镜 波像差 激光显微镜 

分 类 号：TH742.64[机械工程—光学工程]