基于MEMS工艺的声表面波化学毒剂传感器  

SAW sensors sensitive to chemical toxic based on MEMS

作　　者：施云波[1] 张洪泉 董新平[1] 郭建英[1] 

机构地区：[1]哈尔滨理工大学测试技术与通讯工程学院

出　　处：《传感器技术》2005年第9期43-45,共3页Journal of Transducer Technology

基　　金：国家自然科学基金资助项目(60272002);黑龙江省科技攻关项目(GCO3A121)

摘　　要：阐述了声表面波(SAW)传感器的结构与工作原理;介绍了采用MEMS技术加工传感器芯片和敏感膜固定化的关键工艺;给出并分析了传感器的主要特性。试验和测试结果表明:传感器具有灵敏度高、响应速度快、抗汽油干扰等特点。The framework and principle of the SAW sensors are expatiated. The key technics in the solidification of sensitive films and processing sensors chips using MEMS technology are introduced. The main characteristics of the SAW sensor are given and analyzed. Experiment and test results show that the sensitivity of the sensors is higher, the response time and the restoration time are less, resistance to interference of petrol is better and so on.

关 键 词：化学毒剂 声表面波 传感器芯片 敏感膜固定化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]