草酸中纳米孔阵列阳极氧化铝膜的一步法制备及其形貌表征  

One-step preparation and morphology characterization of anodic alumina membrane with nanopore arrays in oxalic acid solution

作　　者：杨文彬[1] 伍智[2] 李鸿波[1] 胡小平[1] 卢忠远[1] 

机构地区：[1]西南科技大学材料科学与工程学院,四川绵阳621010 [2]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《现代化工》2005年第9期41-43,共3页Modern Chemical Industry

基　　金：国家自然科学基金资助项目(No.10376030)

摘　　要：报道了用一步阳极氧化法在经过预处理的高纯铝片上制备具有纳米孔阵列结构的阳极氧化铝膜(AAM)的技术,并用扫描电子显微镜(SEM)和原子力显微镜(AFM)对样品形貌进行了表征.结果表明,高纯铝片在0～20℃、0.1～0.5 mol/L的草酸溶液中用30～60V的直流电一步阳极氧化,再经过去铝和除阻挡层的过程,可制得纳米孔阵列阳极氧化铝膜.制得的阳极氧化铝膜中的孔,尺寸都在纳米级别,且大小均匀,相互平行排列成规整阵列,可用作制备纳米线阵列的模板.The one-step preparation technology of anodic alumina membrane with nanopore arrays on high-purity aluminum foil pretreated is reported in this article. Morphology of sample is analyzed through scanning electron microscopy （SEM） and atom force microscopy （AFM）. Results show that anodic alumina membrane was fabricated on high purity aluminum foil which had been anodized at 30- 60 V DC, in 0 - 20℃, 0.1 - 0.5 mol/L of oxalic acid solution. Parallel pores in anodic alumina membrane prepared are arranged in arrays and pores have very narrow distribution with the sizes of which between 1 nm and 100 nm. The anodic alumina membrane with nanopore arrays can be used as template to prepare nanowire arrays.

关 键 词：阳极氧化铝膜 纳米孔阵列 一步阳极氧化技术 形貌表征 

分 类 号：TQ153.6[化学工程—电化学工业]