数字光栅测振传感器性能分析与测试  

Characteristics Analysis and Testing of Digital Grating Sensor in Vibration Measurement

作　　者：南忠良[1,2] 叶声华[1] 陈宁[2] 李建良[2] 李淑清[2] 

机构地区：[1]天津大学精密测试技术与仪器国家重点实验室,天津300072 [2]天津科技大学电子信息与自动化学院

出　　处：《天津大学学报》2005年第10期919-922,共4页Journal of Tianjin University(Science and Technology)

基　　金：国家自然科学基金资助项目(40174031).

摘　　要：为完善光栅测振传感器的性能,将光栅莫尔条纹技术应用到振动测量,在完成光栅测振传感器原理性实验的基础上,进行了理论分析,并就其特性进行了实验研究.通过构建高精度光栅传感器测试系统,对传感器的静动态特性进行深入研究,并建立了动态模型.实验证明,光栅测振传感器分辨力可达0.025μm,动态频率误差小于1.5%,振幅误差小于3.8%.In order to improve the performance of grating sensors, Moiré fringe technique is utilized in vibration measurement. The theoretical arithmetic was accomplished by functional experiments and an experimental investigation into its characteristics was carried out. By constructing a test system for high precision grating sensors in vibration measurement, a further study on static and dynamic characteristics was given, and the dynamic model was established. As far as the grating vibration sensor is concerned, experimental results show that the resolution can reach 0. 025 μm, the dynamic frequency error is less than 1.5%, and the amplitude error is less than 3.8%.

关 键 词：数字光栅测振传感器 性能分析 莫尔条纹 振动测量 数宁信号 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]