易于集成的有机薄膜场效应晶体管的制备  

Fabrication of Organic Thin-Film Field-Effect Transistors which Easy to be Integrated

作　　者：王伟[1] 石家纬[1] 郭树旭[1] 全宝富[1] 刘明大[1] 张宏梅[1] 梁昌[1] 张素梅[1] 游汉[2] 马东阁[2] 

机构地区：[1]吉林大学电子科学与工程学院集成光电子学国家重点联合实验室,吉林长春130012 [2]中国科学院长春应用化学研究所高分子物理与化学国家重点实验室,吉林长春130022

出　　处：《中国激光》2005年第9期1262-1265,共4页Chinese Journal of Lasers

基　　金：国家自然科学基金(60176022);吉林省自然科学基金(20020634);国家973计划(2003CB314703)资助项目

摘　　要：用有机半导体并五苯作为有源层,聚四氟乙烯作为绝缘层,采用全蒸镀方式在真空室一次性制备了正装结构的有机薄膜场效应晶体管(OTFT)。薄的有机绝缘层使得器件工作在低电压下,有机薄膜场效应晶体管易于与显示像素(有机发光二极管(OLED))集成在同一个透明的刚性或者柔性衬底上。研究了有机薄膜场效应晶体管的源漏接触电阻和沟道电阻对器件性能的影响,结果表明接触电阻是影响器件性能的主要因素。在透明的玻璃衬底上实现了有机薄膜场效应晶体管对同一衬底上100μm×200μm红色有机发光二极管的驱动。An organic thin film field-effect transistor （OTFT） with top-gate structure was designed and fabricated by the method of fully evaporation, with organic semiconductor pentacene as the active layer and teflon as the insulator layer, which could operate in low voltage due to the thin organic insulator layer. The structure and fabrication method make it easy to integrate an organic pixel with an organic light-emitting diode （OLED） driven by an OTFT based on a transparent substrate. The channel resistance and the source-drain contact resistance of OTFT were investigated, and the results indicated that the latter is the main factor to affect the electric performances of OTFTs. Finally, an organic pixel was integrated with an OLED driven by an OTFT on the transparent glass substrate, and a bright red emitting from an 100 μm×200 μm OLED was obtained for naked eye.

关 键 词：光电子学 并五苯 有机薄膜场效应晶体管 源漏接触电阻 全蒸镀制备 

分 类 号：TN321.5[电子电信—物理电子学]