扫描型哈特曼检测装置研究  

Scanning Hartmann inspection apparatus

作　　者：刘丹[1] 闫岩[1] 任冰强[1] 赵永凯[1] 黄立华[1] 黄惠杰[1] 王向朝[1] 

机构地区：[1]中国科学院上海光学精密机械研究所

出　　处：《强激光与粒子束》2005年第9期1377-1381,共5页High Power Laser and Particle Beams

摘　　要：在传统哈特曼检验法基础上研制成功一种扫描型哈特曼检测新装置,可对最大口径为300 mm的聚焦镜在全口径范围内进行采样测量。该检测装置由大口径标准平行光管、扫描式哈特曼光阑、被检聚焦镜、CCD摄像机及计算机组成,在水平和垂直两个径向上开有等间距排列且相互错开半个间距的小孔,并且在步进电机的驱动下绕光轴旋转,可对被检聚焦镜进行全口径连续采样。对有效口径为154 mm的斐索平面干涉仪非球面准直物镜的球差及焦斑能量集中度进行了测量,进而由球差计算得到了波像差,并用干涉法对该准直物镜进行了测量。球差的理论值与测量值最大偏差为14.6%;由新装置测量并计算得到的波像差PV值与干涉法测量并计算得到的PV值偏差为11.5%;实测的80%的能量集中在34μm的范围内,而计算得到的80%的能量集中在28μm之内,最后对结果进行了分析并提出了进一步改进的意见。A scanning Hartmann inspection apparatus has been developed on the basis of the traditional Hartmann test principle. It can inspect large-aperture focusing lenses up to 300 mm in diameter within the full aperture. The apparatus consists of a large-aperture collimator, a scanning Hartmann screen, a focusing lens to be tested, a CCD camera and a computer. The longitudinal aberration and the encircled energy of the aspheric collimating lens of the Fizeau plane interferometer with the effective aperture of Ф54 mm are measured, and it is tested by a WYKO interferometer as well. The results obtained from the two above mentioned methods agree well, which proves that the scanning Hartmann inspection apparatus is reliable.

关 键 词：光学检测 哈特曼检验法 扫描式哈特曼光阑 非球面准直物镜 球差 波像差 能量集中度 

分 类 号：TN247[电子电信—物理电子学]