用微机电系统技术制作微质子交换膜燃料电池  

Preparation of MEMS-based miniaturized proton exchange membrane fuel cell

作　　者：王涛[1] 陈聪[1] 张熙贵[1] 夏保佳[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点联合实验室,上海200050

出　　处：《电源技术》2005年第10期663-667,共5页Chinese Journal of Power Sources

基　　金：国家"863"项目(批准号:2003AA404120)资助

摘　　要：采用微机电系统(MEMS)技术,在n型单晶硅片衬底上制作微型质子交换膜燃料电池(μPEMFC)的流场板,并用电子扫描电镜(SEM)观察其表面形貌。将它与用Nafion1135质子交换膜以传统热压方法制备的膜电极组装成H2/空气自呼吸式"PEMFC,该电池的体积为0.28mL,质量不足0.65g。用电化学阻抗谱(EIS)测量了电池装配压缩比与内阻的关系,结果表明:在常温常压下,当压缩比!2%时,随压缩比增加,电池内阻减小,功率性能提高显著;当压缩比为2%时,电池功率性能最好,其峰值比功率约为83mW/cm2;而当压缩比"2%时,这种变化不显著。A miniaturized H2/air self-breathing proton exchange membrane fuel cell（μPEMFC） was designed and manufactured which is 0.28 mL in volume and 0.65 g in weight. It incorporated a hot-pressed MEA by adopting Nation 1135 PEM and all the basic parts of a conventional H2/air PEMFC in a smaller and simpler package. The flow field of the μPEMFC was fabricated on n-type silicon wafer substrate by means of standard micro electromechanical system （MEMS） techniques. The microstructures of the flow field was checked under scanning electron microscope （SEM）. The relationship between assembly compression ratio and internal resistance of μPEMFC was evaluated by EIS. The performance of the μPEMFCs assembled with various compression ratios were compared. The internal resistance of the cell decreased with the increasing of compression ratio significantly when the ratio was smaller than 2% and indistinctively when the ratio exceeded 2%. The maximum power density of 83 mW/cm^2 was achieved with 2% compression ratio.

关 键 词：微型质子交换膜燃料电池(μPEMFC) 微机电系统(MEMS) 单晶硅片 压缩比 

分 类 号：TM911.4[电气工程—电力电子与电力传动]