Performance Analysis of RF Spiral Inductor with Gradually Changed Metal Width and Space  

金属线宽及线间距渐变的射频螺旋电感(英文)

作　　者：王勇[1] 石艳玲[1] 刘斌贝 丁艳芳[1] 唐深群[1] 朱骏[2] 陈寿面[2] 赵宇航[2] 

机构地区：[1]华东师范大学信息学院 [2]上海集成电路研发中心,上海201203

出　　处：《Journal of Semiconductors》2005年第9期1716-1721,共6页半导体学报（英文版）

基　　金：国家自然科学基金(批准号:60306012);上海市科委启明星计划(批准号:04QMX1419);上海市教委优青后备人才计划(批准号03YQHB061)资助项目~~

摘　　要：To decrease the metal losses of RF spiral inductor,a novel layout structure with gradually reduced metal line width and space from outside to inside is presented. This gradual changed inductor has less eddy-current effect than the conventional inductor of fixed metal width and space. So the series resistance can be reduced and the quality （Q） factor of the inductor relating to metal losses is increased. The obtained experimental results corroborate the validity of the proposed method. For a 6nH inductor on high-resistivity silicon at 2.46GHz,Q factor of 14.25 is 11.3% higher than the conventional inductor with the same layout size. This inductor can be integrated with radio frequency integrated circuits to gain better performance in RF front end of a wireless communication system.为减少射频螺旋电感的金属导体损耗,提出了一种电感金属线宽及金属间距从外到内逐渐变小的新颖结构.与传统的固定金属线宽和间距的电感相比,该渐变结构电感涡流效应的影响较小,金属导体损耗减小,从而降低其串联电阻,品质因子Q值提高.实验结果确证了所提方法的正确性.对一个高阻硅衬底上6nH电感,优化设计的渐变结构电感Q值在2.46GHz处可达到14.25,比版图面积相同、固定线宽及间距的传统电感高11.3%.因此,在无线通信系统的射频前端,采用这种电感与射频集成电路结合,能获得更好的射频电路性能.

关 键 词：RF spiral inductor quality factor eddy-current effect metal losses 

分 类 号：TN301[电子电信—物理电子学]