氧化铝多孔膜振动性能的实验研究  

Experimental Investigation on Dynamic Resonant Frequency and Resonant Modes of Anodic Alumina Porous Film

作　　者：柳兆涛[1] 李凯[1] 辜萍[1] 缪泓[1] 

机构地区：[1]中国科学技术大学力学与机械工程系

出　　处：《实验力学》2005年第3期370-374,共5页Journal of Experimental Mechanics

基　　金：国家自然科学基金(10302026);合肥工业大学校基金(050802F)资助

摘　　要：电化学氧化法制备的氧化铝多孔膜有六角规则密排的纳米孔,其优良的结构特点使其具有良好的用途,可应用于微粒物质分离,氧化剂的载体,微电子机械系统的组件和纳米器件等。在前期研究了这种氧化铝膜的力学性能如拉伸性能和弯曲性能的基础上,本文实验研究了这种氧化铝多孔膜的振动特性即共振频率特性和振动模态,估算了该氧化铝多孔膜的相当弹性模量,与其他方法测得的相当弹性模量基本一致。Porous alumina films containing parallel regular pores of uniform size and normal to substrate surface have been fabricated. Their fine structure and chemical, mechanical and thermal stability made it very useful as separators to separate those small grains from mixed liquid, as carriers of catalyst, and as components of MEMS. However, the significant macro-mechanical properties of porous alumina thin membrane are reported scarcely and have to be investigated. The dynamic resonant frequency and resonant modes have been investigated experimentally on the basis of the exploration mechanical property of the anodic alumina porous film. The resonant frequencies and the resonant modes of the circle specimens have been obtained. The results of frequecies and modes are identical to the classical thin plate theory. And then the apparent elastic modulus of alumina porous film has been calculated. The result is equal approximately to the elastic modulus in bulging test previously. The result lays a useful foundation for further investigation on the mechanical properties of porous alumina film and their relation with micro-structure.

关 键 词：氧化铝多孔膜 振动性能 振动模态 频谱曲线 相当弹性模量 

分 类 号：O348[理学—固体力学]