V_2O_5薄膜在传感器上的研究进展  

Recent progress in research on V_2O_5 thin-film sensors

作　　者：李莉[1] 童茂松[2] 翁爱华[3] 

机构地区：[1]大庆石油学院化学化工学院,黑龙江大庆163318 [2]大庆石油管理局测井公司研发中心,黑龙江大庆163412 [3]吉林大学地球探测科学与技术学院,吉林长春130026

出　　处：《功能材料》2005年第10期1482-1484,1488,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(40304009)

摘　　要：V2O5薄膜具有优异的物理、化学性质,在化工催化、电子、电化学等许多领域有广泛的应用,由于V2O5薄膜对还原性气体和湿度具有良好的敏感特性,其在气体和湿度传感器上的研究也日渐广泛,因此本文综述了V2O5为基体的薄膜在气体传感器和湿度传感器上的研究进展及存在的问题和解决的思路。Since V2O5 thin films have many advanced physical and chemical properties, they have been used wildly in many areas, such as catalyst, electrical technology and electrochemical area. The films also sense to the gas and humidity, and they have obtained much attention in such area. Recent progress of vanadium pentoxide thin films in gas sensor and humidity sensor and their development in advance are described.

关 键 词：V2O5薄膜 气体传感器 湿度传感器 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]