聚对二甲苯防潮薄膜的研究  

Parylene Used for Moisture-Proof Films

作　　者：汪国庆[1] 姚兰芳[1] 沈军[1] 吴广明[1] 

机构地区：[1]同济大学物理系,上海200092

出　　处：《同济大学学报（自然科学版）》2005年第10期1337-1341,共5页Journal of Tongji University:Natural Science

基　　金：国家自然科学基金重点资助项目(20133040);国家'八六三'高技术研究发展计划资助项目(2003AA84ts03);上海市纳米科技与产业发展促进中心资助项目(0352nm056;0352nm022)

摘　　要：采用原子力显微镜、红外光谱、X射线光电子能谱、紫外-可见-近红外分光光度计的测试方法,对聚对二甲苯薄膜的表面形貌、组成和光学性能进行研究.实验结果表明:真空气相沉积工艺制备的聚对二甲苯薄膜表面光滑均匀.薄膜主要由含氯取代基的苯环和亚甲基组成,表面有微量的C—O键生成.薄膜在可见-近红外波段的光透过率超过80%.聚对二甲苯薄膜包覆的变色硅胶浸入水中的防潮变色时间可达150 d,防潮性能明显优于传统的环氧树脂、聚氨酯等材料.薄膜的激光损伤阈值为4 J.cm-2(1 064 nm,1 ns).The structure and properties of parylene films were characterized and measured by AFM, FTIR, XPS, UV-VIS-NIR, etc. The experimental results are as follows： Parylene films are made of phenyl and methylene without any other impurities. The surface of parylene films has C-O bond, the light transmission of parylene films is above 80% in visible band and the reflectance is below 15% in visible and near infrared band. The allochroic silicagels coated with parylene can not become transparent until 150 days later when dipped into water. The moisture-proof performance of parylene films is obviously better than that of the traditional moisture-proof materials such as epoxy resin and polyurethane, The laser induced damage threshold of parylene film is 4 J·cm^-2（1 064 nm, 1 ns）. Films have fine moisture-proof performance and optical performance which are more suitable for KDP crystals

关 键 词：聚对二甲苯薄膜 防潮性能 光学性能 激光损伤阈值 

分 类 号：TN249[电子电信—物理电子学] O484.4[理学—固体物理]