具有纳米分辨力二维超精密定位系统的研制  

Development of a two-dimensional ultra precision positioning system with nanometer resolution

作　　者：叶树亮[1] 谭久彬[1] 

机构地区：[1]哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨150001

出　　处：《哈尔滨工业大学学报》2005年第11期1472-1475,共4页Journal of Harbin Institute of Technology

基　　金：国家自然科学基金资助项目(50275041)

摘　　要：针对传统超精密定位系统存在位移灵敏度、系统频响及重复定位精度难以兼顾的问题,设计并研制了一种具有纳米分辨力的二维超精密定位系统.系统集成平行四连杆结构双柔性二维工作台无间隙传动、双极性可伸缩压电陶瓷微位移驱动和纳米精度电容位移监测等先进技术,在微处理器控制下可实现纳米量级的定位.为改善传统PID控制方法存在的精度低、实时性差等缺陷,提出了一种结合定位过程中各阶段系统不同响应特性的比例、积分和微分(PID)参数自适应控制算法.结果表明:平行四连杆结构能有效地消除运动方向间的交叉耦合,确保了工作台在运动方向上的直线度;在30μm行程内,单轴位移分辨力优于1 nm,重复定位精度优于10 nm,最大行程时响应时间<1 s.A conventional ultra- precision positioning system cannot satisfy displacement resolution, frequency response and repeatability simultaneously. To solve this problem, a kind of two-dimensional ultra-precision positioning system with nanometer resolution is presented. The system employs several advanced technologies such as non-clearance transmission using a two - dimensional stage with double flexible hinges in a structure of parallel four-linkage, micro-displacement actuating using two directional PZT, and monitoring using a capacitance displacement sensor with nanometer accuracy. The system can position at nanometer resolution by the control of a microprocessor. The paper presents the design and manufacturing process of a two-dimensional stage. To improve the low accuracy and poor frequency response of the conventional PID, a parameterg self-adaptive PID algorithm is developed based on the different characteristics Gf the positioning system in the different positioning phases. Experiment results show that the parallel four-linkage structure can efficiently eliminate the positioning coupling of the x and y axial in order to improve the straightness of any single axial of the stage. In the full range of 30μm, the single axis displacement resolution is 1 nm, the repeatability is better than 10 nm, and the positioning time is less than 1 s.

关 键 词：纳米分辨力 二维 超精密 定位系统 

分 类 号：TH711[机械工程—测试计量技术及仪器]