磁悬浮转子规传递系数的变化研究  

STUDY ON TRANSFER COEFFICIENT OF SPINNING ROTOR GAUGE

作　　者：李得天[1] 

机构地区：[1]兰州物理研究所,甘肃兰州730000

出　　处：《真空与低温》2005年第3期139-143,186,共6页Vacuum and Cryogenics

摘　　要：磁悬浮转子规是一种精密的黏滞性真空规,被广泛用作参考标准,其核心部件是一个悬浮在真空中自由旋转的金属球(转子)。对磁悬浮转子规传递系数的长期稳定性以及随气体和温度的变化关系进行了实验研究,得出的结论对于以磁悬浮转子规作为参考标准的校准装置,在进行不确定度评估时具有参考价值。The spinning rotor gauge is an excellent viscosity vacuum gauge. It is widely used as reference standard in calibration services. Its key component is a freely spinning metal sphere （rotor）, which is suspended in vacuum. The longterm stability of spinning rotor gauge, the dependences of transfer coefficient on gases and temperatures were investigated by experiments. The conclusions have reference value for the uncertainty evaluation of vacuum standards which use spinning rotor gauges as reference standards.

关 键 词：磁悬浮转子规 传递系数 性能研究 

分 类 号：TB772[一般工业技术—真空技术]