Novel Nano-scale Overlay Alignment Method for Room-temperature Imprint Lithography  

作　　者：WANG Li DING Yu-cheng LU Bing-heng LI Han-song YAN Le QIU Zhi-hui LIU Hong-zhong YIN Lie 

机构地区：[1]The State Key Lab of Manufactur. Syst. Eng., Xi＇an Jiaotong University, Xi＇an 710049, CHN

出　　处：《Semiconductor Photonics and Technology》2005年第4期275-280,共6页半导体光子学与技术（英文版）

基　　金：NationalNaturalScienceFoundationofChina(50275118);National863Hi-TechProgramofChina(2002AA420050);National973BasicScienceResearchProgramofChina(2003CB716203).

摘　　要：A novel nano-scale alignment technique based on Moiré signal for room-temperature imprint lithography in the submicron realm is proposed. The Moiré signals generated by a pair of quadruple gratings on two templates respectively are optically projected onto a photodetector array, then the detected Moiré signals are used to estimate the alignment errors in x and y directions. The experiment result indicates that complex differential Moiré signal is sensitive to relative displacement of the pair of marks than each single Moiré signal, and the alignment resolutions obtained in x and y directions are ±20nm(3σ) and ±24nm(3σ). They can meet the requirement of alignment accuracy for submicron imprint lithography.A novel nano-scale alignment technique based on Moiré signal for room-temperature imprint lithography in the submicron realm is proposed. The Moiré signals generated by a pair of quadruple gratings on two templates respectively are optically projected onto a photodetector array, then the detected Moiré signals are used to estimate the alignment errors in x and y directions. The experiment result indicates that complex differential Moiré signal is sensitive to relative displacement of the pair of marks than each single Moiré signal, and the alignment resolutions obtained in x and y directions are ±20 nm（3σ） and ±24 nm（3σ）. They can meet the requirement of alignment accuracy for submicron imprint lithography.

关 键 词：Imprint lithography GRATING Nano-scale alignment Moiré signal 

分 类 号：TN305.7[电子电信—物理电子学]