抗共振反射集成光学传感器的研究进展  

Development of integrated optical wave-guided sensors based on antiresonant reflection

作　　者：吴英才[1] 顾铮先 袁一方[2] 

机构地区：[1]广东湛江海洋大学信息学院,广东湛江524025 [2]上海理工大学光电学院,上海200093

出　　处：《传感器技术》2005年第11期1-3,共3页Journal of Transducer Technology

基　　金：上海市教委曙光计划(02SG32);教育发展基金资助项目(01F01)

摘　　要：抗共振反射光波导(ARROW)具有与传统光波导所不同的传播特性。利用覆盖层的抗共振反射性质,ARROW传播单模、高阶模被泄漏到基体。基于折射率的变化,抗共振反射传感器对物理量、化学量和生物分子间的相互作用有很高的敏感性。介绍了ARROW的结构、传感器的工作原理以及最新研究进展。由于可采用CMOS工艺制作波导,且能与光探测器在一块集成,抗共振反射传感器将具有广阔的应用前景。The propagating properties of antiresonant reflecting optical waveguide （ARROW） are different from conventional ones. According to features of antiresonant reflection in cladding layers,it is only the base mode that is allowed to propagate on the ARROW, and high modes are leaked into substrate. Based on variation of refractive index, ARROW sensors are high sensitive to physical and chemical quantity and interaction of bio-motecule. The ARROW structure, operating principle and last development of sensors are introduced. As the waveguides can be developed by CMOS techniques, and they are easily to be integrated with photodetectors on a chip, the future application of ARROW sensors is prospected.

关 键 词：抗共振反射光波导 集成光学 折射率 传感器 

分 类 号：TN256[电子电信—物理电子学] TN252