微桥试验法评价薄膜力学性能的研究  

The investigation of the evaluation of mechanical properties of thin films by microbridge testing

作　　者：周志敏[1] 周勇[1] 丁文[1] 曹莹[1] 陈吉安[1] 杨春生[1] 

机构地区：[1]上海交通大学微纳科学技术研究院薄膜与细微技术教育部重点实验室,上海200030

出　　处：《功能材料》2005年第11期1779-1781,1785,共4页Journal of Functional Materials

基　　金：国家重点基础研究发展计划(973计划)资助项目(G1999033103);国家自然科学基金资助项目(50275096;10402023);上海市纳米专项资助项目(0215nm4104;0352nm014);中国博士后基金资助项目(20040350476)

摘　　要：提出了弹性极限和小挠度极限的概念,对微桥在不同长度、厚度以及可能的弹性模量和残余应力范围内的变形行为进行了表征,提出基于弹性、小挠度极限来选择微桥尺度,并确定实验载荷及小挠度范围的方法,解决了微桥样品尺度以及载荷、挠度范围选择的问题。对两组挠度-载荷实验曲线的分析表明了该方法的可行性。The concept of elastic and small deflection limits was proposed to characterize the deformation behavior of microbridge sample with different length, thickness, module of elasticity and residual stress. According to the limits, a method was proposed to select the dimension of microbridge samples and define the elastic and small deflection range for the experimental load-deflection curve. This method solved the problem of the choice of microbridge sample dimension and the range for elastic deformation and small deflection calculation. It was approved by the analysis of the experiment load-deflection curves of two Ni samples with different dimensions.

关 键 词：微桥试验 力学性能 固态薄膜 

分 类 号：TM922.15[电气工程—电力电子与电力传动]