厚膜压力传感器温度补偿与调理方法研究  

Study On The Temperature Compensation And Single Magnification Of The Thick-Film Pressure Sensor

作　　者：陈建群[1] 马以武[1] 

机构地区：[1]中国科学院合肥智能机械研究所

出　　处：《传感器世界》2005年第10期12-15,共4页Sensor World

基　　金：国家自然科学基金项目资助(批准号:60374050)

摘　　要：考虑到以往厚膜传感器压敏元件和补偿电路的一致性较差、稳定性不够理想的问题,设计了一种优化的厚膜压力传感器片内平面化结构,其可提高传感器温度补偿效果;分析了信号调理电路的合理布局,元件的科学分布对减小误差,提高抗干扰能力的有效性,并给出了实验数据,通过其证明了设想的正确性。According to the unperfect stability and the unpleasing combination between stain sensitive elements and compensation circuit of thick-film sensors, an effective method of temperature compensation by changing the inner structure of thick-film pressure sensors has been designed. It＇s effective that rational single magnification circuit and scientific distribution of elements can decrease error and improve anti-jamming performance.It＇s also improving the performance of the whole test sysytem when choosing Integrated circuit AM457 with high precision and low temperature drift. Finally, the satisfactive test results and conclusion are given.

关 键 词：温度补偿 信号调理 厚膜压力传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]