微区电学测试探针技术  

The Probe Techniques for electric microarea-testing

作　　者：孙冰 

机构地区：[1]天津计量技术研究所,300192

出　　处：《半导体杂志》1996年第2期38-50,共13页

摘　　要：本文阐述了微区电学测试的重要性,对探针的微区测试条件及方法作了评价.最后提出若干种适合微区薄层电阻测量的测试结构.This paper states the importance of the electric microarea-testing and gives a comment on the probe testing conditions and methods for microareas. At last, several test structures suitable to sheet resistance measurement of the microareas are presented.

关 键 词：探针技术 微区 电阻率 

分 类 号：O655.9[理学—分析化学]