Phosphosilicate glass film for optical waveguide by sol-gel method  

作　　者：SHEN Jian LI Ai-wu ZHENG Jie ZHANG Le-tian LIU Guo-fan ZHENG Wei ZHANG Yu-shu 

机构地区：[1]National Integrated Optoelectronics Lab., Dept. of Electronics Eng., Jilin University, Changchun 130012, China

出　　处：《Optoelectronics Letters》2005年第2期121-123,共3页光电子快报（英文版）

基　　金：This work was funded by National Emphases Basis Research andProgramming Project of China (3B8000061038) and InnovationFoundation of Jilin University (450011022214) .

摘　　要：In this paper, silica-on-silicon erbium-doped phosphosilicate glass film material was fabricated for optical waveguides by sol-gel method. Samples were characterized and analyzed. It is demonstrated that we have got well-distributed, good translucent, alterable thickness of film and glass state erbium-doped phosphosilicate films material for optical waveguides by sol-gel method.In this paper, silica-on-silicon erbium-doped phosphosilicate glass film material was fabricated for optical waveguides by sol-gel method. Samples were characterized and analyzed. It is demonstrated that we have got well-distributed, good translucent, alterable thickness of film and glass state erbiumdoped phosphosilicate films material for optical waveguides by sol-gel method.

关 键 词：磷硅酸盐 玻璃薄膜 光学波导 生物材料 

分 类 号：O484[理学—固体物理]